Abstract:
A method and system for generating a surface treating plasma. Gas is provided to a power conducting electrode and flows through the power conducting electrode. Power pulses are applied to the power conducting electrode in the range of 40 kW to 100 kW with a DC generator, at a frequency in the range of 1 Hz to 62.5 kHz, and with a pulse duration in the range of 0.1 microseconds to 3,000 microseconds. Peak currents in the range of 100 Amps to 400 Amps are produced and plasma is formed from the gas. A substrate surface may then be treated with the plasma.
Patent Number:
10,440,808
Date Of Issue:
10/08/2019
Inventors:
Vasiliki Zorbas Poenitzsch; Ronghua Wei; Kent E. Coulter; Edward Langa